一种半导体制造中关键批次产品的自动化实时调度方法

In this paper , a bullet lots\' automatic dispatching method in semiconductor manufacturing is proided. On the premise of ensuring product quanlity, stations which bullet lots\' could reserve are identified by considering qzones\' technological requirements and realtime machine status. Then, this paper consider bullet lots\' running speed and equipments operation characteristics to control equipments\' product in advance, then, bullet lots\' can be dispatched from one equpments to another equipments directly without waiting time, and workers loading can be greatly reduced.