氧化钛薄膜纳米压痕过程的有限元分析

In this paper, based on the nanoindentation experiments of titania films coating on glass surface, the nanoindentation process was analyzed by the finite element method. By comparison with the experimental results, the validity of the finite element analysis was verified. At the same time, the finite element simulation can also dynamically investigated the changes of the elastic-plastic mechanical behaviors of the films during the nanoindentation process.