两腔体压电泵

The structure and working principle of the pumps consisted of two PZT Actuators was introduced, and the output performance of the pumps with different structure and driving strategy was analyzed. Two piezoelectric pumps, serial connection and parallel connection, were fabricated. The double-chamber pumps were tested, respectively, first with each of the two actuators being actuated solely, and then with both actuators being actuated (in anti-phase or in-phase) synchronously. The test results show that both serial and parallel double-chamber pumps achieve greater performance with the actuators working in anti-phase. The flow-rate the parallel connection pump is about two times of that of single chamber micropump. For the serial connection pump, both the flow-rate and backup pressure are about two times of that of single-chamber micropump. Keywords：Micropump, PZT Actuator, Double-chamber piezoelectric micropump