微波等离子体化学气相沉积金刚石薄膜的制备
Synthesis Diamond thin films by using MPCVD
在爆炸法得到的钠米金刚石微粉上，用无水酒精与丙酮溶液混合，得到需要电镀的电镀溶液然后在铜片上电镀处理后利用微波等离子体化学气相沉积制备金刚石薄膜。SEM对结构进行分析。并研究了它的场电子发射特性，得到较好场发射特性。
bstract Cathodic electrophoretic deposition of diamond particles was performed on Cu substrate, then the diamond thin films were grown on the substrate by CH4 and H2 by microwave plasma chemical vapor deposition(MPCVD).The experiment samples were observed by SEM and their field emission characteristics were tested
田浩希、赵约瑟
材料科学物理学
微波化学气相沉积（MPCVD） 金刚石薄膜 电镀 场发射
MPCVDdiamond filmselectrophoreticfiled emission
田浩希,赵约瑟.微波等离子体化学气相沉积金刚石薄膜的制备[EB/OL].(2005-12-12)[2025-08-02].http://www.paper.edu.cn/releasepaper/content/200512-264.点此复制
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