间隙可调胶体晶体单层制备技术
Monolayer colloidal mask with tunable interstice size for nanosphere lithography
将水气界面胶体自组装与化学气相沉积法相结合,制备得到了间隙尺寸可调的胶体晶体单层。实验中,利用氮气鼓泡装置携载四氯化硅蒸气,与装置内部的水蒸气以气相的方式进行反应,生成的二氧化硅均匀地沉积在漂浮于水面的胶体晶体单层上,在胶体微球的表面形成一层二氧化硅壳层,进而使得间隙尺寸均匀的减小。采用这种方法可以制备得到应用于纳米球刻蚀技术的高质量、间隙尺寸可调的、可转移的胶体晶体单层。
In this paper, polystyrene (PS) monolayer colloidal crystal (MCC) with tunable interstice size is prepared by a combination of self-assembly of PS nanospheres at the air-water interface and chemical vapor deposition of silica. Water vapor around the MCC reacts with the silicon tetrachloride steam introduced by nitrogen carrier gas to form silica. Consequently, it induces the formation of a continuous silica layer coating on the surface of each PS sphere, which results in the shrinkage of the interstice between neighboring PS spheres. The method provides a facile approach to the fabrication of interstice-size-tunable, high-quality colloidal masks for nanosphere lithography application.
王晓青、沈德忠、郑露、耿翀、余洁、严清峰
材料科学晶体学
胶体化学与界面化学单层胶体模板间隙尺寸可调纳米球刻蚀
colloid chemistry and interface chemistrymonolayer colloidal masktunable interstice sizenanosphere lithography
王晓青,沈德忠,郑露,耿翀,余洁,严清峰.间隙可调胶体晶体单层制备技术[EB/OL].(2012-10-06)[2025-08-05].http://www.paper.edu.cn/releasepaper/content/201210-21.点此复制
评论