厚度变化对SmCo薄膜磁性和结构的影响
Effect of film thickness on magnetic properties and structure in Cr/SmCo/Cr films
利用磁控溅射制备了Sm含量为18.0 at%的不同厚度的SmCo薄膜，并对其进行了退火处理。实验结果表明当薄膜厚度为30 nm时，退磁过程体现软磁相与硬磁相的两相行为；随着厚度的增加，SmCo5的单一相逐渐明显，当薄膜的厚度为70 nm时，薄膜软磁相消失而表现出良好的硬磁相单相行为；当厚度继续增加至140 nm，薄膜中又出现软磁相，表现为退磁过程中的两相行为。同时还发现随着SmCo层厚度的增加，薄膜矫顽力降低而饱和磁化强度增加。结构分析表明这种现象归因为随SmCo层厚度变化形成不同的SmCo合金相，从而表现为不同的磁学行为。
In this paper, Cr/SmCo/Cr films with different thickness were deposited on Si substrates by magnetron sputtering, followed by an annealing process. The magnetic properties and structure of Cr/SmCo/Cr films were investigated. Experimental results shown that the SmCo film of 30 nm exhibited two-phase behavior in the demagnetization process. The SmCo5 single phase became obvious with the increase of SmCo layer thickness, and shoulder disappeared for the SmCo film of 70 nm. Further increasing to 140 nm, the shoulder appeared, and the film shown two-phase behavior again. Moreover, the coercivity reduced slightly and the saturation magnetization increased obviously with the increasing thickness. XRD results indicated that the phenomenon was attributed to the formation of different SmCo phases in the different thickness, thus the films performed different magnetic behaviors.
李明华、李宁、于广华、冯春、滕蛟、李宝河
材料科学物理学
材料物理与化学钐钴薄膜永磁矫顽力反转行为
Materials physics and chemistrySmCo filmPermanent magnetCoercivityReversal behavior
李明华,李宁,于广华,冯春,滕蛟,李宝河.厚度变化对SmCo薄膜磁性和结构的影响[EB/OL].(2011-11-25)[2025-08-02].http://www.paper.edu.cn/releasepaper/content/201111-450.点此复制
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