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高动态范围闭环电容式加速度计接口电路设计

High dynamic range closed-loop capacitive accelerometer interface circuit design

中文摘要英文摘要

针对提高加速度计的动态范围,本文提出了一种基于连续时间的全差分闭环加速度计接口电路。该电路整体采用斩波稳定技术对闪烁噪声进行抑制以获得更低的噪底,并通过class AB型的闭环输出级以实现更大的输出摆幅。同时针对加速度计闭环接口电路由于加速度传感器共轭极点的影响容易产生震荡的问题,通过引入PID(比例-积分-微分)频率补偿电路对闭环的稳定性进行补偿,缩短了闭环接口电路的响应时间并减小了静态误差,提高了闭环的稳定性。接口电路采用SMIC 180nm BCD工艺设计实现,仿真结果显示,闭环系统的带宽为250Hz,量程为±25g,在1~250Hz频率范围内的输出动态范围约为126dB,非线性约为0.092%。

o improve the dynamic range of accelerometers, a continuous-time based fully differential closed-loop accelerometer interface circuit is proposed in this paper. The circuit adopts chopper stabilization technique to suppress flicker noise to obtain lower noise floor, and achieves larger output swing by class AB type closed-loop output stage. The closed-loop accelerometer interface circuit is also designed to compensate the stability of the closed-loop by introducing a PID (proportional-integral-derivative) frequency compensation circuit, which shortens the response time of the closed-loop interface circuit and reduces the static error to improve the stabHigh dynamic range closed-loop capacitive accelerometer interface circuit designility of the closed-loop. The interface circuit is designed and implemented using SMIC 180nm BCD process. The simulation results show that the closed-loop system has a bandwidth of 250Hz, a range of ±25g, an output dynamic range of about 126dB in the frequency range of 1~250Hz, and a nonlinearity of about 0.092%.

徐姣、常玉春、孙海荣

微电子学、集成电路电子电路

加速度计接口电路斩波稳定高动态范围

accelerometerinterface circuitchopper stabilizationhigh dynamic range

徐姣,常玉春,孙海荣.高动态范围闭环电容式加速度计接口电路设计[EB/OL].(2023-05-16)[2025-07-18].http://www.paper.edu.cn/releasepaper/content/202305-99.点此复制

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