硅微陀螺仪的芯片级温控设计

In this paper, a new temperature error correction technology based on on-chip temperature control for the silicon micro-gyroscope is presented. The proposed architecture utilizes on-chip micro-heater and temperature sensor to control the temperature of micro-gyroscope, which is used to correct the temperature error of the micro-gyrocope. Comparing to the traditional technology of temperature control, the new method has more shorter response time, higher sensitivity, lower power consumption, better repeatability and temperature uniformity and so on. Steady-state and transient response of temperture and power consumption of the on-chip temperature control is analysed by Ansys soft. The simulation results show that the temperature of the micro-gyroscope reach the about 59℃ within the 10s in the power consumption of 0.0989 W and temperature difference of the micro-gyroscope is within the 0.7℃. Finally, the micro-gyroscope with the on-chip temperature control is processed by the DDSOG and wet etching process.