压电薄膜的摩擦、磨损性能

s a lead-free piezoelectric material with potential application, 0.5Ba(Ti0.8Zr0.2)O3- 0.5(Ba0.7Ca0.3)TiO3 (BZT-0.5BCT) ceramics which has morphotropic phase boundary (MPB) composition deserves lots of attention due to its excellent ferroelectric and piezoelectric properties. BZT-0.5BCT lead-free piezoelectric film is synthesized on a Si (100) substrate by Sol-Gel process. A topography of the film measured using an atomic force microscopy and a scanning electron microscopy shows that the surface of the prepared film is smooth, and the grain is hemispheric and of 80-100 nm in diameter. The film is 1.7 μm in thickness, with pores inside. Friction experiments show that the friction between the silicon tip and the piezoelectric film is much larger than that between the silicon tip and the SiO2 substrate, because of an existence of the electrostatic force between the film and the silicon tip. However, the friction coefficients obtained are approximately equal. Nano-scratch experiments show that, the BZT-0.5BCT film has a high normal carrying capacity, but a poor tangential wear resistance. The average elastic modulus of the film is 23.64 5GPa, and its hardness is 2.7～4 GPa, both slightly lower than that of the bulk value in PZT ceramics.