静电悬浮转子微陀螺的建模仿真研究

micromachined electrostatically suspended gyroscope (MESG) employs electrostatic forces to suspend and rotate the rotor, which isolates the proof mass from mechanical friction, so that the MESG has the potential to deliver navigation-grade performance. By modeling and simulation of the MESG, the parameters of structure, fabrication process, detection and control can be optimized, which will shorten the development period and reduce the cost of the microdevice. In this paper, models for process level, physical level, device level and system level of the MESG, using bottom-up modeling approach, are constructed based on CoventorWare software. The capacitance distribution between each suspension electrode and common electrode, and characteristic of initial levitation control of the MESG, are simulated and analyzed, which are employed as examples to illustrate that modeling and simulation are an effective way for complicated microsystem design of the MESG.