新型共面波导(CPW)的研究与应用
Research and Application of a New Coplanar Waveguide (CPW)
本文对毫米波MEMS共面波导（CPW）的损耗及设计方法进行了分析，在此基础上设计了一种新型共面波导结构。新型的方形的共面波导传输线设计，在传统的共面波导基础上增宽了信号线的宽度，并在硅衬底下面增加接地金属板，加强了器件的机械强度，有效地降低了电阻损耗，介质损耗和辐射损耗。最后阐述了共面波导在滤波器方面的应用，在共面波导(CPW)结构上周期加载特定的结构的滤波器能够有效地抑制表面波和谐波，有效地改善滤波器的带宽。
his article describes the basic theory and design methods of the coplanar waveguide (CPW), a new coplanar waveguide structures is designed. The new coplanar waveguide structures is the improved square coplanar waveguide structure, which reduces loss, increases the mechanical strength by widening CPW signal line and adding a ground Metal plate under the silicon substrate based on the traditional CPW. Finally, this paper presents the application of transmission line in the filters.
巩刚、邓中亮
电子电路微电子学、集成电路电子技术应用
共面波导MEMS传输线滤波器
oplanar waveguideMEMSTransmission lineFilter
巩刚,邓中亮.新型共面波导(CPW)的研究与应用[EB/OL].(2011-12-27)[2025-08-05].http://www.paper.edu.cn/releasepaper/content/201112-733.点此复制
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