双势阱静电波动的驻波共振和耦合共振

he coupling resonance is formed by the plasma electrostatic oscillation in the magnetic trap consisting of the electric field and the magnetic field at the surface of the unbalanced magnetron sputtering target and the potential well composed of the magnetron sputtering target and the opposite bias substrate in parallel. Langmuir probe was used to study the FFT power spectra of the plasma properties and the float potential signals. Under typical discharge conditions, the eigenfrequency in both traps were respectively in the range of 30-50 kHz or 10-20kHz, and the electron temperatures in both traps calculated with the acoustic stand wave mode conformed to the experimental results.