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表面硫钝化对GaAs材料光响应特性的影响研究

Electrical and optical characterization of surface sulfur passivation in GaAs

中文摘要英文摘要

砷化镓( GaAs )材料作为III-V族半导体材料中的典型代表,在光电子器件中有着广泛应用。但是材料表面由于表面态引入的复合中心问题,制约了GaAs材料光电子器件的性能。本文中采用湿法硫钝化的方式,实现了对材料表面态问题的改善。在GaAs薄膜钝化的光致发光研究中,钝化处理后发光强度提高约14倍。进一步对光电性能的研究中,钝化处理后样品光电流和响应度提高了4倍左右。文章从能带原理分析了钝化处理对样品性能的提升,其主要原因在于钝化处理过程中对表面态密度和肖特基势垒高度的调节。本实验工作对推动GaAs基材料在光电器件领域的应用具有较为重要意义。

s one of the most important III-V semiconductor materials, Gallium arsenide (GaAs) is widely used in optoelectronic devices due to its high electron and hole mobility. However, the surface states of GaAs materials seriously affect its properties, hence hinder the improvement of the performance of GaAs based devices. It is believed that the surface state density of GaAs materials can be significantly lowered by surface sulfur passivation. A 14-fold enhancement in the PL intensity is observed on the comparative investigation of the same individual sample with and without sulfur passivation layer. Also, GaAs sample treated with sulfide solutions is also found to produce a 4-fold increase in the photocurrent and responsivity. The improvement of the performance is contributed to the variation of the surface density and the Schottky barrier height during the passivation process. The study of sulfur passivation provides an important basis for the study of high performance GaAs based optoelectronic devices.

容天宇、夏宁、王登魁、方铉、唐吉龙、蔡昕旸、魏志鹏、王晓华、房丹、王新伟

光电子技术半导体技术

光致发光硫钝化GaAs光响应

PhotoluminescenceSulfur passivationGaAsResponsivty

容天宇,夏宁,王登魁,方铉,唐吉龙,蔡昕旸,魏志鹏,王晓华,房丹,王新伟.表面硫钝化对GaAs材料光响应特性的影响研究[EB/OL].(2017-10-27)[2025-08-20].http://www.paper.edu.cn/releasepaper/content/201710-92.点此复制

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