多孔棉絮状TeO2薄膜的制备及其乙醇气敏特性
Preparation and ethanol sensing properties of porous cotton-like TeO2 thin films
以四氯化碲与乙醇反应生成前驱体氯代乙醇碲，采用非水解溶胶?凝胶法制备出多孔棉絮状TeO2薄膜，并利用X射线衍射、扫描电子显微镜对TeO2薄膜进行结构表征。结果表明，具有四方相晶体结构的多孔棉絮状TeO2薄膜由直径为80~350 nm、长度为250~900 nm的TeO2纳米条状物所组成。气敏特性研究结果表明，TeO2薄膜在125~225 C工作温度范围内对乙醇气体表现出良好的气敏特性，且响应和恢复具有可逆性；在200 C工作温度下获得对乙醇气体的最大灵敏度；TeO2薄膜对乙醇气体的灵敏度随着乙醇气体浓度的增加而呈现上升趋势。
he precursor (C2H5O)xTeCl4?x was firstly obtained by the partial substitution reaction of TeCl4 and C2H5OH, and then TeO2 thin films with porous cotton-like nanostructures were prepared by non-hydrolytic sol?gel method. Structural characterization by means of X-ray diffraction and scanning electron microscopy showed that the films had a single-crystalline tetragonal TeO2 structure. The films with high porosity were composed of TeO2 nanostrips, which were 80~350 nm in diameter and 250~900 nm in length. Gas sensors based on TeO2 thin films obtained the highest response at 200 C and showed reversible response to ethanol gas at an operating temperature of 125~225 C. The sensor response increased with increasing ethanol gas concentration.
陈思含、公月、刘金通、沈岩柏
化学晶体学电子元件、电子组件
二氧化碲薄膜溶胶?凝胶法乙醇气敏特性
eO2thin filmsol?gel methodethanolsensing property
陈思含,公月,刘金通,沈岩柏.多孔棉絮状TeO2薄膜的制备及其乙醇气敏特性[EB/OL].(2016-05-03)[2025-08-21].http://www.paper.edu.cn/releasepaper/content/201605-27.点此复制
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