扩展光源干涉仪的数值仿真与实验验证

Extended source interferometer, compared with the classical point source interferometer, can suppress coherent noise of environment and system, decrease dust scattering effects and reduce high-frequency error of reference surface. Numerical simulation and experimental verification of extended source interferometer are discussed in this paper. The basic model is established by using optical design software Zemax. Matlab codes are programmed to rectify the field parameters of the optical system, get a series of interferometric data and plot the relation curves. Combined with the simulation, the experimental platform of the extended source interferometer is established. The relation between the spatial coherence and the size of the extended source is verified through the analysis of the visibility of interference fringes. The simulation result is in line with the result given by real extended source interferometer. Therefore, based on the extended ource, the Fizeau interferometer can realize high precision measurement.