应力敏感的柔性自旋阀器件的制备与输运性质研究

In this paper,we have obtained FeCo、FeGa Magnetic thin film growth process with small coercivity and good square by changing the growth pressure, power and so on with using ultra high vacuum magnetron sputter system. And further we prepared the spin valve structure with FeCo as free layer by optimizing the film thickness. We introduced a large magnetostrictive coefficient material FeGa alloy to the free layer and obtained a spin valve structure with composite free layer: FeGa/FeCo .And the spin valve giant magnetoresistance ratio is 5.9%, the free layer coercivity is 34 Oe. So the spin valve has the best performance.We have also fabricated the spin valve structure with a composite free layer on flexible substrate PET successfully and through stress testing, the results show that we obtain a flexible spin valve device with a composite free layer as strain sensor.