rN硬质薄膜的制备工艺对其性能的影响
Influence of Properties CrN Thin Flim Prepared for Performance
本研究采用封闭磁场非平衡磁控溅射法，在高速钢M42表面覆盖CrN薄膜；利用SEM表征薄膜组织结构和表面形貌，并用洛氏硬度计压坑法测定薄膜的结合性能，用MH-5显微硬度计测其努氏硬度，探讨制备工艺为固定的偏流、偏压、时间下，OEM对其性能的影响。结果表明：偏流为4A、偏压为40V、镀膜时间为2h时，OEM越高，硬度越高；当OEM为55%时，结合力HF为1级。
rN coatings were prepared on the surface of M42 high speed steel by Closed Field Unbalanced Magnetron Sputtering Iron Plating. The microstructure and surface morphology, bonding strength and hardness(HK) of the CrN coatings were characterized by scanning electron microscope (SEM), indentation method of Rockwell tester and MH-5 micro hardness tester, respectively. The influence of Optical Emission Monitor (OEM) on the performance of CrN coatings with fitted bias current, bias voltage and deposition time. It was found that the higher the OEM was, the harder the coatings were, with bias current of 4 A, bias voltage of 40V and deposition time of 2h. The coatings showed the best bonding strength with HF1 when the OEM was 55%.
江利、冶艳
材料科学金属学、热处理
rN薄膜封闭非平衡磁控溅射OEM显微硬度计
rN thin filmClosed Unbalanced Magnetic SputteringOEMMicro hardness tester
江利,冶艳.rN硬质薄膜的制备工艺对其性能的影响[EB/OL].(2011-06-07)[2025-08-16].http://www.paper.edu.cn/releasepaper/content/201106-126.点此复制
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