半导体晶圆制造系统的时变多目标生产控制与实例分析

Semiconductor Wafer Fabrication System (SWFS) is the typical large-scale complicated re-entrant manufacturing system. To meet multiple objectives of fast changed as time-variable for both global and local optimization, effective production control policies must be pursued and explored. Motivated by this challenge, this paper proposes a FUZZY-based approach to solve three main issues on Time-Variable-Multiple-Objectives (TVMO) dispatching optimization for wafer fabrication. The first one is developing algorithm to determine proper priority index for each lot with simulation experiment. The second one is providing useful method to determine the stage move target for all stages. The third one is using dispatching criteria matrix table to perform real-time dispatcher for specific area. The study of dispatching optimization that provides positive support for related researches of production planning, scheduling, dispatching and control in the semiconductor manufacturing field.