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表面气流状态对TFA-MOD法制备YBCO薄膜的影响

he influence of the gas flow state on the growth of YBCO films prepared by TFA-MOD

中文摘要英文摘要

在三氟乙酸盐沉积法制备钇钡铜氧超导薄膜的过程中,反应产物氟化氢气体可能聚集在样品表面对薄膜产生不利影响,因此表面的气流状态是重要的影响因素之一。不同于直接改变气体流量的方法,我们采用了一种新的旋转样品的方法来研究表面气体流速对薄膜微观结构、超导性质等的影响。实验结果表明,钇钡铜氧超导薄膜的表面形貌、超导性质等受热处理过程中样品旋转速率的影响很明显,我们给出了初步的解释,认为旋转速率上升时样品表面气体流速上升,氟化氢气体能被更有效的带走,因此薄膜生长速率增加,各方面性质有明显的变化。

uring the TFA-MOD process of preparing YBCO superconducting thin films, the gas flow rate on the films is important because of the potential stagnation of the gaseous product HF at the gas/film interface. Rather than altering the volume gas flow rate, we developed a new method of rotating a specially designed sample holder to evaluate the influence of the gas flow state on the microstructures and superconducting properties of YBCO films. The experimental results show that this influence is obvious, which is basically explained by us that the gas flow rate on the films increases when the rotating speed is raised, then the HF gas could be removed away more effectively, resulting in a higher growth rate of YBCO films, and correspondingly the microstructure and superconducting properties of these films change.

韩征和、冯峰、陈欢

材料科学物理学

FA-MOD,旋转速率,临界电流

Keywords: TFA-MOD rotating speed critical density

韩征和,冯峰,陈欢.表面气流状态对TFA-MOD法制备YBCO薄膜的影响[EB/OL].(2008-04-10)[2025-08-16].http://www.paper.edu.cn/releasepaper/content/200804-330.点此复制

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