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外延生长的二氧化铬(CrO2)薄膜在透射电镜下的表征

EM characterization of epitaxial chromium dioxide (CrO2) film

中文摘要英文摘要

(通过化学气相沉积(CVD)方法在蓝宝石Al2O3上生长外延二氧化铬(CrO2)薄膜。采用透射电子显微镜(TEM)表征了外延CrO2的界面结构,并利用电子能量损失谱(EELS)定性分析了薄膜中铬价态的空间分布。在CrO2与底物的界面处澄清了不均匀的富氧Cr2O3过渡层。

Epitaxial chromium dioxide (CrO2) film was grown on the sapphire Al2O3 by chemical vapor deposition (CVD) method. The interfacial structure of epitaxial CrO2 was characterized by transmission electron microscopy (TEM), and the spatial distribution of chromium valence in the film was qualitatively analyzed by electron energy loss spectroscopy (EELS). An inhomogeneous oxygen-rich Cr2O3 transition layer was clarified at the interface between CrO2 and the substrate.

郎佩琳、姚湲、禹日成、沈希、刘潇宇、杨天中

物理学晶体学材料科学

rO2Transmission electron microscopyEELS

rO2 1Transmission electron microscopy 2EELS 3

郎佩琳,姚湲,禹日成,沈希,刘潇宇,杨天中.外延生长的二氧化铬(CrO2)薄膜在透射电镜下的表征[EB/OL].(2023-03-31)[2025-04-26].http://www.paper.edu.cn/releasepaper/content/202303-367.点此复制

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