Single-exposure profilometry using partitioned aperture wavefront imaging
Single-exposure profilometry using partitioned aperture wavefront imaging
We demonstrate a technique for instantaneous measurements of surface topography based on the combination of a partitioned aperture wavefront imager with a standard lamp-based reflection microscope. The technique can operate at video rate over large fields of view, and provides nanometer axial resolution and sub-micron lateral resolution. We discuss performance characteristics of this technique, which we experimentally compare with scanning white light interferometry.
Roman Barankov、Jerome Mertz
光电子技术
Roman Barankov,Jerome Mertz.Single-exposure profilometry using partitioned aperture wavefront imaging[EB/OL].(2013-07-19)[2025-08-07].https://arxiv.org/abs/1307.5267.点此复制
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