|国家预印本平台
首页|Single-exposure profilometry using partitioned aperture wavefront imaging

Single-exposure profilometry using partitioned aperture wavefront imaging

Single-exposure profilometry using partitioned aperture wavefront imaging

来源:Arxiv_logoArxiv
英文摘要

We demonstrate a technique for instantaneous measurements of surface topography based on the combination of a partitioned aperture wavefront imager with a standard lamp-based reflection microscope. The technique can operate at video rate over large fields of view, and provides nanometer axial resolution and sub-micron lateral resolution. We discuss performance characteristics of this technique, which we experimentally compare with scanning white light interferometry.

Roman Barankov、Jerome Mertz

10.1364/OL.38.003961

光电子技术

Roman Barankov,Jerome Mertz.Single-exposure profilometry using partitioned aperture wavefront imaging[EB/OL].(2013-07-19)[2025-08-07].https://arxiv.org/abs/1307.5267.点此复制

评论