一种静电驱动可调电容器的设计

he design of a new tunable capacitor which is fabricated using MEMS technology is presented in this paper. The electrostatically actuated membrane is used in this kind of tunable capacitor. Both of two parallel-plate of the new tunable capacitor can deflect when subject to parallel-plate electrostatic actuation, this is different with the novel parallel-plate tunable capacitor which is only one of the two parallel-plate can deflect. There is a dielectric film between the two parallel-plate of the tunable capacitor. The dielectric film severs to prevent contact between them. The device consists two air gaps, one of them is between the two parallel-plats and the other one is under the below plate.