基于柔性铁电薄膜的流体驱动式压电传感器
High sensitive microfluidic flow sensor based on aligned piezoelectric nanofibers
压电传感器由于高灵敏度、简单结构、易于集成等特点而被广泛应用。然而，随着电子器件向小型化和集成化方向发展的趋势,对于压电元件的要求越来越高。基于铁电薄膜制备的电子器件不仅超薄轻便，而且有较高的灵敏度。本研究巧妙地将有序的P(VDF-TrFE)压电纤维薄膜集成于微流沟道中，制备出了高灵敏度的流体驱动式压电传感器。该压电传感器能在低流速的流体驱动下工作，在流速为13μl/h-450μl/h的流体驱动下，其灵敏度为0.36mV/(μl/h),输出电信号最大为120mV。在以一定流速下用不同粘度的液体驱动时，其输出电信号亦不同。故该压电传感器不仅能测试流体的流速大小，而且能测试流体的粘度。因此，相比于昂贵的生物医学检测器材，该压电传感器更廉价，有望成为医学检测元件更理想的一种选择。
microfluidic flow sensor based on aligned polyvinylidene fluoride trifluoroethylene P(VDF-TrFE) piezoelectric nanofibers has been developed, which can be used for real-time detection of low flow rate and viscosity in microchannels. The detection principle dependence of voltage drop output by nanofibers while sensing pressure drop along the microchannel. Due to the high sensitivity of nanofibers, this sensor responded linearly to low flow rates ranging from 13 μl/h to 451 μl/h, and viscosities of ethylene glycol aqueous solution ranging from 1 mPa?S to 16.1 mPa?S at 25℃, respectively. These findings highlight the potential of P(VDF-TrFE) nanofibers in multifunctional sensors.
蔡博、喻小磊、刘威、国世上、赵兴中、张玲玲、张灿灿、刘慧琴、游苏键、肖亮
电子元件、电子组件生物科学教育生物工程学
材料科学压电传感器纳米纤维丝P(VDF-TrFE)
piezoelectricP(VDF-TrFE)nanofibersflow sensor
蔡博,喻小磊,刘威,国世上,赵兴中,张玲玲,张灿灿,刘慧琴,游苏键,肖亮.基于柔性铁电薄膜的流体驱动式压电传感器[EB/OL].(2015-10-26)[2025-08-16].http://www.paper.edu.cn/releasepaper/content/201510-222.点此复制
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