一种磁性薄膜/石英音叉复合磁传感器研究

tuning fork magnetic sensor structure is designed by using one chip magnetic-film compound with quartz tuning fork to settle the problem of low Q value in magnetic-electric lamination magnetic sensor. The static magnetic field is detected through measuring the change of resonant frequency or Q value. The compound position of film is designed using the Finite Element Analysis. The most sensitive compound position is the top of the tuning fork side arm is got, and the experiment proof is proceed. Experiment result indicates that the Q value is about 2000 at zero bias magnetic filed, the high sensitivity of resonant frequency and Q value in static magnetic field can reach 9.233Hz/mT and 119.471/mT, respective. The resolution of the magnetic field can reach 10-5 Tesla when the resolution of frequency detection is 0.1Hz and the frequency stability of tuning fork is 20ppm. The resolution of the magnetic field can reach 10-6 Tesla when the resolution of Q value detection is 1 and the Q value stability of tuning fork is 20ppm. The measured Q value is better than measured frequency.