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多种气体测量用线列探测器制备技术研究

Research on the preparation of pyroelectric line array sensor for multiple gas measurment

中文摘要英文摘要

利用紫外激光切割机通过切割LiTaO3单晶材料制备得到1×32线列敏感元,制备得到热释电线列红外探测器。使用经过斩波器调制的黑体辐射,测试了探测器在5.3Hz到202.3Hz的电压响应率、噪声等效功率和探测率等参数。结果表明,制备的线列红外探测器的探测率大于2×108cmHz1/2W-1,优于商品器件,具有良好的频率特性,可应用于高频响应方面。

he 1×32 line array elements and pyroelectric sensor were prepared by using ultraviolet laser cutting on lithium tantalate single crystle.The voltage responsivity,noise equivalent power and detection rate were tested from 5.3Hz to 202.3Hz,by using the chopper modulation of blackbody.The result shows that the detection rate of the sensor was above 2×108cmHz1/2W-1.The sensor has good frequency characteristics and can be used in high frequency application.

傅武钺、帅垚、吴传贵

光电子技术电子元件、电子组件物理学

微电子与固体电子学紫外激光切割技术红外探测器

microelectronics and solid state electronicsUV laser cuttinginfrared sensor

傅武钺,帅垚,吴传贵.多种气体测量用线列探测器制备技术研究[EB/OL].(2015-05-12)[2025-08-18].http://www.paper.edu.cn/releasepaper/content/201505-128.点此复制

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