基于Labview的伺服调焦控制系统
Focussing-servo system Based on Labview
精密调焦伺服控制系统属于激光直写设备中的关键技术之一。而在激光直写设备中需要有高分辨力的调焦伺服机构对光刻物镜进行调焦伺服。本文简要介绍伺服调焦系统的原理及实现方法。采用强大的图形化工具Labview实现分析，检测，驱动的全过程，取得了良好的效果。
he working principle of binary optics laser direct writing device is introduced Method of high resolution focussing servo is discussed .And the optical writing object lens of the laser direct writing device must be focused in spots by a focusing-servomechanism. This paper introduces a method of implementing focussing-servo system. Using the tool of Labview ,it can be easy to implement analyse detect and drive.The result have proved good.
刘洋、熊木地
电子技术应用自动化技术、自动化技术设备光电子技术
二元光学激光直写设备， 纳米分辨力，调焦机构，归一化处理，Labview
laser direct writing devicenanometer resulutionfocusing-servo mechanismlabview
刘洋,熊木地.基于Labview的伺服调焦控制系统[EB/OL].(2006-02-24)[2025-08-03].http://www.paper.edu.cn/releasepaper/content/200602-199.点此复制
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