溶胶-凝胶法制备Ba0.90Sr0.10ZrxTi1-xO3成分梯度薄膜的介电性能研究
ielectric properties of compositionally graded Ba0.90Sr0.10ZrxTi1-xO3 thin films prepared by sol–gel technique
采用溶胶-凝胶法在Pt(111)/Ti/SiO2/Si衬底上制备了Ba0.90Sr0.10ZrxTi1-xO3 (BSZT)(x=0~0.40)组分及其成分梯度薄膜，研究了各组分及梯度薄膜的相结构，显微结构以及在外加电场作用下的介电特性。结果表明，通过合理设计梯度薄膜的成分分布，不仅可以实现对薄膜介电常数的调控，使其保持较高的调谐率，还可获得良好的介电常数温度稳定性。与单相薄膜相比，梯度薄膜同时具有适中的介电常数，低的介电损耗，高的材料优值及良好的介电常数温度稳定性。
In this work, the homogenous Ba0.90Sr0.10ZrxTi1-xO3(BSZT) (x=0~0.40) and compositionally graded BSZT thin films was prepared by sol–gel processing. The dielectric properties of homogenous BSZT and compositionally graded BSZT thin films were characterized by measuring the dielectric constant and dielectric loss as a function of applied electric field, temperature and frequency. As a result, the techniques of reducing temperature dependence of dielectric constant were realized and the graded films still kept high tunability, high FOM and low dielectric loss.
高丽娜、姚熹、翟继卫
物理学材料科学电子元件、电子组件
材料物理与化学梯度薄膜溶胶-凝胶调谐率介电性能
materials physics and chemistrygraded thin filmssol-geltunabilitydielectric properties
高丽娜,姚熹,翟继卫.溶胶-凝胶法制备Ba0.90Sr0.10ZrxTi1-xO3成分梯度薄膜的介电性能研究[EB/OL].(2009-12-30)[2025-08-16].http://www.paper.edu.cn/releasepaper/content/200912-1176.点此复制
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