硅烷分子自组装膜对有机薄膜晶体管中介电层的修饰作用
pplication of self-assembled monolayer in thin film transitors
本文主要介绍一种有机薄膜晶体管的制备及其性能，利用十六烷基三氯硅烷作为自组装膜分子来修饰SiO2介电层，然后真空蒸镀有机分子DHDAP作为半导体层材料，得到的器件显示空穴传输为0.31cm2/Vs，而不加自组装膜制备的DHDAP晶体管则不显示空穴传输特性。由此证明分子自组装膜对于晶体管介电层的修饰作用显著，其主要原因在于自组装膜诱导半导体层形成有序结晶膜，从而提高了载流子传输效率。
his study explores a strategy of using hexadecyl-trichloro silanee as self-assembled monolayer (SAMs) on Si/SiO2 surface and depositing DHDAP in vacuum as semiconductor layer to form thin film transistors, which showed the field-effect mobility as high as 0.31 cm2/Vos. If no SAMs, the transistor does not show field effect mobility. So it is confirm that the SAMs show key role to induce crystallization of the semiconductor layer and improve the properties of the thin film transistor.
李哲峰
半导体技术微电子学、集成电路电子技术应用
半导体器件与技术有机薄膜晶体管分子自组装膜长链硅烷分子
hin film semiconductorOrganic thin film transistorSelf-assembled monolayerLong-chain silicane
李哲峰.硅烷分子自组装膜对有机薄膜晶体管中介电层的修饰作用[EB/OL].(2013-07-01)[2025-07-25].http://www.paper.edu.cn/releasepaper/content/201307-7.点此复制
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