沉积温度对BCN薄膜成分及结构的影响

In this paper, BCN films were deposited by magnetron sputtering with different deposition temperatures. X-ray photoelectron spectroscopy and Fourier transform infrared spectroscopy were used to confirm the composition and bonding structure of the BCN films. The results indicated that the change of deposition temperatures has little effect on the composition of BCN films, but affected the disordered degree and bonding structures. The disordered degree of films decreased with the increasing of the deposition temperatures. The main structure is B-C bonding at low deposition temperature, and the content of B-N bonding increased with the increasing of the deposition temperature. Sp3 B-N bonding appeared when the deposition temperature reached 300℃, whose content increased with the increasing of the deposition temperature.