复杂光学系统的通用光线追迹计算方法

It is necessary for the optical system of interferometer to design and analysis of error with simulation method for design and evaluation of the complex optical systems. In this report, based on the optical system used in our research, the general ray tracing method in a homogeneous medium between two arbitrary surfaces considering the setting error of the optical elements, and between an arbitrary 3D surface and a common surface, such as plane, spherical, and cylindrical surfaces, and the ray tracing method in optical system composed with some homogeneous medium segments is proposed and the calculation method for the image of measured surfaces is discussed. Finally, based on a simulation model for laser interferometer, the simulation and the measurement experiment is done respectively using planar test piece, and the two results match well. So the validity of proposed methods is proved and the usefulness of the method is verified.